Epitaxial lift-off and its applications

Abstract

In this paper the authors will give an overview of the epitaxial lift-off (ELO) technique and its applications. This first part will describe the basic technology, which includes chemical lift-off, handling bonding, stress, alignment, etc. The second part will give an overview of device results obtained with ELO (LED and lasers on Si, MESFETs on InP, OEICs etc).