Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma

High Carrier Mobility in Single-Crystal Plasma-Deposited Diamond

Jan Isberg, J. Hammersberg, Erik M. J. Johansson et al. · Science · 2002 · 1.3K citations

Natural Sciences, Materials Science, Physics +14

Dry etching of SiC in inductively coupled Cl₂/Ar plasma

Liudi Jiang, Natalie O. V. Plank, M. A. Blauw et al. · Journal of Physics D Applied Physics · 2004 · 61 citations

Engineering, Materials Engineering, Materials Science +17

Reflection/transmission confocal microscopy characterization of single-crystal diamond microlens arrays

Erdan Gu, H. W. Choi, C. Liu et al. · Applied Physics Letters · 2004 · 60 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Fabrication and characterization of diamond micro-optics

Chee-Leong Lee, H. W. Choi, Erdan Gu et al. · Diamond and Related Materials · 2005 · 43 citations

Engineering, Materials Engineering, Materials Science +9

Fabrication of natural diamond microlenses by plasma etching

H. W. Choi, Erdan Gu, Chonghua Liu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 40 citations

Natural Sciences, Materials Engineering, Materials Science +15