Concepedia

Reactive ion etching damage to the electrical properties of ferroelectric thin films

Wei Pan, C. L. Thio, Seshu B. Desu

Journal of materials research/Pratt's guide to venture capital sources · 1998 · 32 citations · 14 references

DOI

Concepts

References

14

Ferroelectric thin films

Materials Today · 2005 · 699 citations · Full text

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Ferroelectric materials for 64 Mb and 256 Mb DRAMs

Logan Parker, A.F. Tasch · IEEE Circuits and Devices Magazine · 1990 · 304 citations

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PLZT thin-film waveguides

Takao Kawaguchi, Hideaki Adachi, Kentaro Setsune et al. · Applied Optics · 1984 · 134 citations

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Effect of ion-beam sputter damage on Schottky barrier formation in silicon

Stephen J. Fonash, S. Ashok, Ranbir Singh · Applied Physics Letters · 1981 · 126 citations

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Damage induced in Si by ion milling or reactive ion etching

S. W. Pang, D.D. Rathman, D. J. Silversmith et al. · Journal of Applied Physics · 1983 · 117 citations

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