Sensors and Actuators · 1984 · 20 citations · 9 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectronicsSemiconductor MaterialsSensorsDevice ReliabilityMems SensorsMicroelectromechanical SensorsMicroscale BiosensorsSensor MaterialsSilicon MaterialsMicrofabricated SensorsPh SensorsSiliconSilicon DioxideSilicon Nitride
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ISFET's using inorganic gate thin films
Hitoshi Abe, M. Esashi, T. Matsuo · IEEE Transactions on Electron Devices · 1979 · 170 citations