Concepedia

Reactor design optimization based on 3D modeling of nitrides deposition in MOCVD vertical rotating disc reactors

Bojan Mitrovic, A. Parekh, J. Ramer, V. Merai, E. Armour, L. Kadinski, A. Gurary

Journal of Crystal Growth · 2006 · 50 citations · 2 references

DOI

Concepts

References

2

Computational analysis of GaN/InGaN deposition in MOCVD vertical rotating disk reactors

L. Kadinski, V. Merai, A. Parekh et al. · Journal of Crystal Growth · 2003 · 58 citations

, , +13

The scaling of CVD rotating disk reactors to large sizes and comparison with theory

Alan Thompson, R. A. Stall, P. Zawadzki et al. · Journal of Electronic Materials · 1996 · 33 citations

, , +10