Reactor design optimization based on 3D modeling of nitrides deposition in MOCVD vertical rotating disc reactors - Concepedia

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Reactor design optimization based on 3D modeling of nitrides deposition in MOCVD vertical rotating disc reactors

50

Citations

2

References

2006

Year

Bojan Mitrovic, A. Parekh, J. Ramer, V. Merai, E. Armour, L. Kadinski, A. Gurary

Journal of Crystal Growth

EngineeringMechanical EngineeringReactor Design Optimization3D PrintingDisc ReactorsNitrides Deposition

References

	Year	Citations

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