Concepedia

Novel thermoplastic polymers with improved release properties for thermal NIL

Hakan Atasoy, Marko Vogler, Tomi Haatainen, A. Schleunitz, Dariusz M. Jarząbek, Helmut Schift, F. Reuther, G. Gruetzner, Z. Rymuza

Microelectronic Engineering · 2011 · 16 citations · 3 references

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References

3

The Adhesion Between Polymers

Hugh R. Brown · Annual Review of Materials Science · 1991 · 148 citations

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Adhesion between template materials and UV-cured nanoimprint resists

Frances A. Houle, Eric P. Guyer, Dolores C. Miller et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 71 citations

, , +17

Fabrication of mesas with micro- and nanopatterned surface relief used as working stamps for step and stamp imprint lithography

Arne Schleunitz, Christian Spreu, Tomi Haatainen et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 10 citations · Full text

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