Concepedia

A. Schleunitz

AS

6

Publications

92

Citations

6

H-Index

2006

Active since

Affiliations

Micro Resist Technology (Germany)(Current)

Paul Scherrer Institute

Technische Universität Berlin

A. Schleunitz is an author at Micro Resist Technology (Germany) specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsNanophotonicsNanotechnologyPolymer ScienceOptical MaterialsThermal EngineeringMechanical EngineeringPolymers

Publications per year

2006–2014

6

Publications

6

Energy-based thermal reflow simulation for 3D polymer shape prediction using Surface Evolver

Robert Kirchner, A. Schleunitz, Helmut Schift · Journal of Micromechanics and Microengineering · 2014 · 32 citations

Engineering, Mechanical Engineering, Material Simulation +25

Novel thermoplastic polymers with improved release properties for thermal NIL

Hakan Atasoy, Marko Vogler, Tomi Haatainen et al. · Microelectronic Engineering · 2011 · 16 citations

Materials Science, Polymer Material, Engineering +10

Optical gas sensitivity of a metaloxide multilayer system with gold-nano-clusters

A. Schleunitz, H. Steffes, R. Chabicovsky · Sensors and Actuators B Chemical · 2007 · 11 citations

Materials Science, Optical Materials, Engineering +11

A novel optical gas sensor based on sputtered InxOyNz films with gold-nano-dots

H. Steffes, A. Schleunitz, Ulrich Gernert et al. · Microelectronic Engineering · 2006 · 11 citations

Materials Science, Optical Materials, Engineering +14

UV-curable hybrid polymers for optical applications: technical challenges, industrial solutions, and future developments

G. Gruetzner, Jan J. Klein, Marko Vogler et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 11 citations

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