Hakan Atasoy

Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers

Arne Schleunitz, Vitaliy A. Guzenko, Martin Messerschmidt et al. · Nano Convergence · 2014 · 64 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Combining nanoimprint lithography and a molecular weight selective thermal reflow for the generation of mixed 3D structures

Arne Schleunitz, Christian Spreu, Marko Vogler et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 28 citations

Engineering, Materials Engineering, Materials Science +13

Novel thermoplastic polymers with improved release properties for thermal NIL

Hakan Atasoy, Marko Vogler, Tomi Haatainen et al. · Microelectronic Engineering · 2011 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +14