Robert Kirchner

Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers

Arne Schleunitz, Vitaliy A. Guzenko, Martin Messerschmidt et al. · Nano Convergence · 2014 · 63 citations · Full text

UV-NIL fabricated bio-inspired inlays for injection molding to influence the friction behavior of ceramic surfaces

M. Mühlberger, M. Rohn, J. Danzberger et al. · Microelectronic Engineering · 2015 · 43 citations

Materials Science, Tribological Coating, Injection Molding +9

ZEP520A — A resist for electron-beam grayscale lithography and thermal reflow

Robert Kirchner, Vitaliy A. Guzenko, Ismo Vartiainen et al. · Microelectronic Engineering · 2016 · 42 citations

Materials Science, Electron-beam Grayscale Lithography, Engineering +10

High fidelity 3D thermal nanoimprint with UV curable polydimethyl siloxane stamps

Nachiappan Chidambaram, Robert Kirchner, Mirco Altana et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 33 citations

Engineering, Polymer Nanotechnology, Responsive Polymers +25

Energy-based thermal reflow simulation for 3D polymer shape prediction using Surface Evolver

Robert Kirchner, A. Schleunitz, Helmut Schift · Journal of Micromechanics and Microengineering · 2014 · 32 citations

Engineering, Mechanical Engineering, Material Simulation +25