Concepedia

Silicon nitride and oxynitride films

F.H.P.M. Habraken, A. E. T. Kuiper

Materials Science and Engineering R Reports · 1994 · 162 citations · 217 references

DOI

Concepts

References

217

Infrared spectroscopic study of SiO<i>x</i> films produced by plasma enhanced chemical vapor deposition

P. G. Pai, S. S. Chao, Yasuo Takagi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 799 citations

, , +17

The hydrogen content of plasma-deposited silicon nitride

W. A. Lanford, Myron J. Rand · Journal of Applied Physics · 1978 · 782 citations

, , +17

Chemical effects on the frequencies of Si-H vibrations in amorphous solids

G. Lucovsky · Solid State Communications · 1979 · 602 citations

, , +13

Optical Properties of Silicon Nitride

Herbert R. Philipp · Journal of The Electrochemical Society · 1973 · 466 citations

, , +17

Gap states in silicon nitride

J. David Robertson, Martin J. Powell · Applied Physics Letters · 1984 · 437 citations

, , +17