Properties of chemical-vapor-deposited titanium nitride

Phase diagrams of binary titanium alloys

J.R. Murray · Medical Entomology and Zoology · 1987 · 1K citations

Natural Sciences, Materials Engineering, Materials Science +14

Structure and properties of TiN coatings

J.‐E. Sundgren · Thin Solid Films · 1985 · 905 citations

Natural Sciences, Materials Engineering, Materials Science +12

Growth and Properties of LPCVD Titanium Nitride as a Diffusion Barrier for Silicon Device Technology

Arthur Sherman · Journal of The Electrochemical Society · 1990 · 128 citations

Engineering, Materials Engineering, Materials Science +17

Kinetical Aspects of the LPCVD of Titanium Nitride from Titanium Tetrachloride and Ammonia

M. J. Buiting, A. F. Otterloo, A.H. Montree · Journal of The Electrochemical Society · 1991 · 93 citations

Natural Sciences, Materials Engineering, Materials Science +15

LPCVD Titanium Nitride for ULSIs

N. Yokoyama, K. Hinode, Y. Homma · Journal of The Electrochemical Society · 1991 · 84 citations

Natural Sciences, Materials Engineering, Materials Science +17