Concepedia

M. J. Buiting

MJ

Statistics

Publications

3

Citations

141

H-Index

3

Active since

1989

Affiliations

Philips (Netherlands)(Current)

Philips (Finland)

M. J. Buiting is an author at Philips (Netherlands) specializing in engineering, chemical engineering, and materials science.

Top concepts

Publications per year

1989–1992

3

Publications

3

Kinetical Aspects of the LPCVD of Titanium Nitride from Titanium Tetrachloride and Ammonia

M. J. Buiting, A. F. Otterloo, A.H. Montree · Journal of The Electrochemical Society · 1991 · 93 citations

, , +18

Relationship Between the Process Parameters and Film Properties of “Low Temperature” Low Pressure Chemical Vapor Deposition Titanium Nitride Films

M. J. Buiting, A. F. Otterloo · Journal of The Electrochemical Society · 1992 · 36 citations

, , +17

A high throughput blanket tungsten process based on H2/WF6 chemistry

Jurriaan Schmitz, A.J.M. Van Dijk, J.L.G. Suijker et al. · Applied Surface Science · 1989 · 12 citations

, , +6

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