Piezoelectric properties of PZT films prepared by the sol–gel method and their application in MEMS - Concepedia

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Piezoelectric properties of PZT films prepared by the sol–gel method and their application in MEMS

30

Citations

9

References

2007

Year

Sibei Xiong, Hiroshi Kawada, Hiroshi Yamanaka, Tomoaki Matsushima

Thin Solid Films

Materials ScienceEngineeringFerroelectric ApplicationApplied PhysicsPzt FilmsFerroelectric MaterialsSol–gel MethodPiezoelectric MaterialsPiezoelectric PropertiesPiezoelectric MaterialPiezoelectricityThin Films

References

	Year	Citations

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