Concepedia

Publication | Closed Access

Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms

DOI

157

Citations

4

References

2002

Year

Kaoru Yamashita, Hiroshi Katata, Masanori Okuyama, Hiromi Miyoshi, Genro Kato, Seiji Aoyagi, Yoshihiko Suzuki
Sensors and Actuators A Physical

References

YearCitations

Page 1