Microfabrication of a nickel mold insert by a modified deep X-ray lithography process and its application to hot embossing

Micromixers—a review on passive and active mixing principles

Volker Hessel, Holger Löwe, Friedhelm Schönfeld · Chemical Engineering Science · 2005 · 1.5K citations

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Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations

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M. Heckele, W. Bacher, K. Müller · Microsystem Technologies · 1998 · 281 citations

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Microreactor technology and process miniaturization for catalytic reactions—A perspective on recent developments and emerging technologies

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Natural Sciences, Chemical Engineering, Chemistry +17

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Dong Sung Kim, Se Hwan Lee, Chong H. Ahn et al. · Lab on a Chip · 2006 · 162 citations

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