Publication | Closed Access
Influence of reactor cleanness and process conditions on the growth by PVT and the purity of 4H and 6H SiC crystals
13
Citations
6
References
1999
Year
Materials ScienceMaterials EngineeringChemical EngineeringSic CrystalsEngineeringNuclear CeramicReactor CleannessProcess ConditionsCarbide
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