Mechanics of Smart-Cut® technology

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Silicon on insulator material technology

M. Bruel · Electronics Letters · 1995 · 1K citations

Engineering, Materials Engineering, Materials Science +16

SEMICONDUCTOR WAFER BONDING

U. Gösele, Qiaoling Tong · Annual Review of Materials Science · 1998 · 594 citations

Engineering, Materials Engineering, Materials Science +17

Application of hydrogen ion beams to Silicon On Insulator material technology

M. Bruel · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1996 · 313 citations

Engineering, Materials Engineering, Materials Science +10

On the mechanism of the hydrogen-induced exfoliation of silicon

M. K. Weldon, Vittorio Marsico, Yves J. Chabal et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 307 citations

Natural Sciences, Materials Engineering, Materials Science +17