Integrated optics combined with micromechanics on silicon

All-silicon active and passive guided-wave components for λ = 1.3 and 1.6 µm

Richard Soref, J. Larenzo · IEEE Journal of Quantum Electronics · 1986 · 402 citations

Engineering, Electrical Engineering, Materials Science +17

Silica-based single-mode waveguides on silicon and their application to guided-wave optical interferometers

N. Takato, K. Jinguji, M. Yasu et al. · Journal of Lightwave Technology · 1988 · 232 citations

Engineering, Electrical Engineering, Materials Science +17

Characterization of Silicon‐Oxynitride Films Deposited by Plasma‐Enhanced CVD

W. A. P. Claassen, H. A. J. Th. v. d. Pol, A. H. Goemans et al. · Journal of The Electrochemical Society · 1986 · 65 citations

Natural Sciences, Materials Engineering, Materials Science +16

Optical channel waveguides in silicon diffused from GeSi alloy

B. Schüppert, J. Schmidtchen, K. Petermann · Electronics Letters · 1989 · 36 citations

Engineering, Electrical Engineering, Materials Science +17

Integrated optics based on silicon oxynitride thin films deposited on silicon substrates for sensor applications

Dethard Peters, K. Fischer, Jörg Müller · Sensors and Actuators A Physical · 1991 · 30 citations

Engineering, Materials Engineering, Materials Science +16