Silica-based single-mode waveguides on silicon and their application to guided-wave optical interferometers

Abstract

Low-loss silica-based single-mode waveguides and directional couplers are fabricated on silicon substrates. Their application to Mach-Zehnder interferometer type guided-wave devices is demonstrated. Optical switches or tunable optical couplers are fabricated using the thermooptic effect. Asymmetrical Mach-Zehnder interferometers are successfully applied to multi/demultiplexers for optical FDM transmission systems.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>