Sensors and Actuators A Physical · 1991 · 30 citations · 1 references
EngineeringMaterials EngineeringMaterials ScienceOpticsPhotonicsThin FilmsIntegrated OpticsOptical SensingOptical SensorsOptical Thin FilmsPhotonic Integrated CircuitsSemiconductor Thin FilmsIntegrated Electro-optic DevicesIntegrated Optical SensorsSemiconductor Oxide Thin FilmsSensor ApplicationsSiliconSilicon Thin FilmsSilicon-based Optical Sensors
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