Concepedia
Thin Solid Films · 1988 · 53 citations · 19 references
Natural SciencesMaterials EngineeringMaterials ScienceMechanical Behavior Of MaterialsSemiconductor MaterialsThin FilmsChemical Vapor DepositionSemiconductor PhysicsSemiconductor SurfacesSemiconductor Thin FilmsThin Film Mechanical PropertiesThin Film StrainSilicon Nitride
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The hydrogen content of plasma-deposited silicon nitride
W. A. Lanford, Myron J. Rand · Journal of Applied Physics · 1978 · 782 citations
Natural Sciences, Chemistry, Materials Science +17
Thermal stresses and cracking resistance of dielectric films (SiN, Si3N4, and SiO2) on Si substrates
A. K. Sinha, H. J. Levinstein, T. E. Smith · Journal of Applied Physics · 1978 · 269 citations
Engineering, Materials Engineering, Materials Science +17
Characterization of Silicon Nitride Films
E. A. Taft · Journal of The Electrochemical Society · 1971 · 211 citations
Natural Sciences, Materials Engineering, Materials Science +17
Some Properties of Vapor Deposited Silicon Nitride Films Using the SiH[sub 4]-NH[sub 3]-H[sub 2] System
K.E. Bean, P. S. Gleim, Richard Yeakley et al. · Journal of The Electrochemical Society · 1967 · 96 citations
Deposition and composition of silicon oxynitride films
A. E. T. Kuiper, S. W. Koo, F.H.P.M. Habraken et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 93 citations