Concepedia

G.A. Sokolova

GS

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Publications

1

Citations

53

H-Index

1

Active since

1988

Affiliations

Institute of Semiconductor Physics(Current)

G.A. Sokolova is an author at Institute of Semiconductor Physics specializing in applied physics, engineering, and thin films.

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Publications per year

1988–1988

1

Publications

1

Correlation between stress and structure in chemically vapour deposited silicon nitride films

A.G. Noskov, E. B. Gorokhov, G.A. Sokolova et al. · Thin Solid Films · 1988 · 53 citations

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