Concepedia

On the relationship between stress induced leakage currents and catastrophic breakdown in ultra-thin SiO2 based dielectrics

D. A. Buchanan, J. H. Stathis, E. Cartier, D. J. DiMaria

Microelectronic Engineering · 1997 · 47 citations · 3 references

DOI

Concepts

References

3

Impact ionization, trap creation, degradation, and breakdown in silicon dioxide films on silicon

D. J. DiMaria, E. Cartier, D. Arnold · Journal of Applied Physics · 1993 · 716 citations

, , +17

Mechanism for stress-induced leakage currents in thin silicon dioxide films

D. J. DiMaria, E. Cartier · Journal of Applied Physics · 1995 · 547 citations

, , +16

On the breakdown statistics of very thin SiO2 films

J. Suñé, I. Placencia, N. Barniol et al. · Thin Solid Films · 1990 · 256 citations

, , +10