Monolithic integrated spreading-resistance silicon flow sensor

A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applications

R. G. Johnson, Robert E. Higashi · Sensors and Actuators · 1987 · 140 citations

Engineering, Air Flow, Sensors +7

Silicon gas flow sensors using industrial CMOS and bipolar IC technology

David Moser, R. Lenggenhager, H. Baltes · Sensors and Actuators A Physical · 1991 · 99 citations

Electrical Engineering, Engineering, Gas Sensor +8

Resonating microbridge mass flow sensor

S. Bouwstra, R. Legtenberg, H.A.C. Tilmans et al. · Sensors and Actuators A Physical · 1990 · 92 citations · Full text

Engineering, Flow Control, Microscale System +2

Monolithic integrated direction-sensitive flow sensor

Johan H. Huijsing, J. P. Schuddemat, William Verhoef · IEEE Transactions on Electron Devices · 1982 · 55 citations

Room Temperature, Engineering, Sensors +13

An integrated silicon double bridge anemometer

Anton F P. van Putten · Sensors and Actuators · 1983 · 43 citations

Electrical Engineering, Engineering, Measurement +5