Fluorine—an enabler in advanced photolithography - Concepedia

Concepedia

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Fluorine—an enabler in advanced photolithography

14

Citations

10

References

2003

Year

M. Rothschild, T. M. Bloomstein, T. H. Fedynyshyn, Vladimir Liberman, William A. Mowers, Roger F. Sinta, M. Switkes, Andrew Grenville, Kevin J. Orvek

Journal of Fluorine Chemistry

Materials ScienceEngineeringElectron-beam LithographyBeam LithographyMicroscopyAdvanced PhotolithographyApplied PhysicsNanofabricationNanolithography Method

References

	Year	Citations

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