7
Publications
300
Citations
7
H-Index
1998
Active since
William A. Mowers is an author at MIT Lincoln Laboratory specializing in engineering, chemistry, and polymer science.
Top concepts
EngineeringChemistryPolymer ScienceMaterial ScienceApplied PhysicsPolymer ChemistryPhotochemistryOptical MaterialsOrganic ChemistryPolymer Synthesis
Publications per year
1998–2004
7
7
High-resolution fluorocarbon-based resist for 157-nm lithography
Theodore H. Fedynyshyn, Roderick R. Kunz, Roger F. Sinta et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 18 citations
Optical Materials, Engineering, Electron-beam Lithography +17
High-resolution fluorocarbon-based resist for 157-nm lithography
Theodore H. Fedynyshyn, William A. Mowers, Roderick R. Kunz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 15 citations
Optical Materials, Engineering, Electron-beam Lithography +24
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