Statistics
Publications
7
Citations
301
H-Index
7
Active since
1998
William A. Mowers is an author at MIT Lincoln Laboratory specializing in natural sciences, polymer materials, and materials science.
Publications per year
1998–2004
7
7
High-resolution fluorocarbon-based resist for 157-nm lithography
Theodore H. Fedynyshyn, Roderick R. Kunz, Roger F. Sinta et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 18 citations
Natural Sciences, Materials Engineering, Materials Science +8
High-resolution fluorocarbon-based resist for 157-nm lithography
Theodore H. Fedynyshyn, William A. Mowers, Roderick R. Kunz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 15 citations
Natural Sciences, Materials Engineering, Materials Science +8
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