Theodore H. Fedynyshyn

Encapsulation of Nanosized Silica by in Situ Polymerization of <i>tert</i>-Butyl Acrylate Monomer

Ivan Sondi, Theodore H. Fedynyshyn, Roger F. Sinta et al. · Langmuir · 2000 · 153 citations

Materials Science, Nanosized Silica, Chemical Engineering +13

Progress Toward Diamond Power Field‐Effect Transistors

M. W. Geis, Travis C. Wade, C.H. Wuorio et al. · physica status solidi (a) · 2018 · 91 citations · Full text

Materials Science, Semiconductors, Electrical Engineering +13

Polymer photochemistry at advanced optical wavelengths

Theodore H. Fedynyshyn, Roderick R. Kunz, Roger F. Sinta et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 33 citations

Optical Materials, Engineering, Polymer Photochemistry +17

&lt;title&gt;Characterization and modeling of a positive-acting chemically amplified resist&lt;/title&gt;

John S. Petersen, Chris A. Mack, James W. Thackeray et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 27 citations

Engineering, Electron-beam Lithography, Chemistry +16

The relationship between critical dimension shift and diffusion in negative chemically amplified resist systems

Theodore H. Fedynyshyn, Michael F. Cronin, Charles R. Szmanda · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 26 citations

Materials Science, Materials Engineering, Engineering +12