Kevin J. Orvek

Materials issues for optical components and photomasks in 157 nm lithography

Vladimir Liberman, T. M. Bloomstein, M. Rothschild et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 54 citations

Natural Sciences, Materials Engineering, Materials Science +16

Neutralization in ion-surface collisions

C. A. Moyer, Kevin J. Orvek · Surface Science · 1982 · 53 citations

Natural Sciences, Physics, Nuclear Physics +6

Carbonized layer formation in ion implanted photoresist masks

Kevin J. Orvek, C. Huffman · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 38 citations

Engineering, Materials Engineering, Materials Science +10

Neutralization in ion-surface collisions

C. A. Moyer, Kevin J. Orvek · Surface Science · 1982 · 29 citations

Natural Sciences, Physics, Nuclear Physics +6

Investigation of thermophoretic protection with speed-controlled particles at 100, 50, and 25mTorr

Jung Hyeun Kim, Christof Asbach, Se‐Jin Yook et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 25 citations

Engineering, Mechanical Engineering, Physics +13