Development of a large-force low-loss metal-contact RF MEMS switch - Concepedia

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Development of a large-force low-loss metal-contact RF MEMS switch

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Citations

5

References

2006

Year

T. Seki, Yutaka Uno, K. Narise, Takahiro Masuda, K. Inoue, S. Sato, Fumihiko Satô, K. Imanaka, S. Sugiyama

Sensors and Actuators A Physical

Electrical EngineeringEngineeringMicrofabricationApplied PhysicsNano Electro Mechanical SystemMicroelectronicsMicro-electromechanical System

References

	Year	Citations

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