Micromachined relay which utilizes single crystal silicon electrostatic actuator

Abstract

A MMR which utilizes a single crystal silicon based electrostatic actuator is presented in this paper. The MMR is fabricated by critical-dimensions-controllable SOI-A/B (Anodic bonding) process. Size of the MMR is 2.0 mm/spl times/2.5 mm and driving voltage is 24 V. Hot-switching tests with 10 V-10 mA resistive load were performed 10/sup 6/ cycles with around 0.5 ohm relay resistance (sum. of signal line resistance, contact resistance and package resistance). Breakdown voltage (stand off voltage) is larger than 200 V. Switching time was around 03 msec and power consumption was less than 0.05 mW.