Thin Solid Films · 1975 · 118 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsSurface ScienceThin FilmsMetalsThin Film NucleationThin-film DepositionThin-film MaterialsLow-temperature DepositionSilicide CoatingsSilicide ContactsThin-film Growth KineticsThin-film Growth Mechanisms
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Principles and applications of ion beam techniques for the analysis of solids and thin films
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Implanted noble gas atoms as diffusion markers in silicide formation
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Natural Sciences, Materials Engineering, Materials Science +5
Structure and growth kinetics of Ni2Si on silicon
K. N. Tu, J. W. Mayer · Thin Solid Films · 1975 · 212 citations