Publication | Closed Access
Piezoelectric microspeakers with high compressive ZnO film and floating electrode
22
Citations
10
References
2008
Year
Materials ScienceEngineeringMicrofabricationPiezoelectric MicrospeakersPiezoelectric NanogeneratorsMechanical EngineeringTransducer PrinciplePiezoelectric MaterialsPiezoelectricityPiezoelectric MaterialUltrasoundMicromachined Ultrasonic Transducer
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