Publication | Closed Access

The temperature dependence of stresses in aluminum films on oxidized silicon substrates

Materials ScienceAluminium NitrideEngineeringSurface ScienceApplied PhysicsTemperature DependenceSemiconductor Device FabricationAluminum FilmsElectronic PackagingOxidized Silicon SubstratesChemical Vapor DepositionThin Film ProcessingMicrostructure