International Journal of Modern Physics B · 2014 · 28 citations · 27 references
EngineeringElectrical EngineeringManufacturing EngineeringMicroelectronicsSemiconductor DevicesSemiconductor MaterialsDopingIntegrated Circuit DesignIntegrated Circuit DevicesIntegrated Circuit FabricationSemiconductor Device MaterialsSemiconductor HeterostructuresCommon Collector ConfigurationDevice FabricationDevice OptimizationDopant DefectsDoping ControlRadiation DefectsRadiation-induced DefectsSemiconductor Heterojunctions
In this paper, we introduce an approach to increase integration rate of bipolar heterotransistors. The approach based on doping of required parts of heterostructure by diffusion or implantation and optimization of annealing of dopant and/or radiation defects. As simplification of the considered approach to increase integration rate we consider possibility to used common collector.
27
Point defects and dopant diffusion in silicon
P. Fahey, Peter B. Griffin, J.D. Plummer · Reviews of Modern Physics · 1989 · 1.4K citations