Solar Energy Materials and Solar Cells · 1999 · 16 citations · 8 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsAmorphous MaterialsAmorphous SemiconductorsAmorphous SolidsHigh-temperature PlasmasSemiconductor Device MaterialsSilicon MaterialsAmorphous Semiconductor FilmsAmorphous SiliconDeposition RateDeposition TechniquesPlasma-enhanced DepositionPolycrystalline MaterialsPolycrystalline SiliconPulsed Plasma Sources
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