Hajime Kuwahara

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Publications

Citations

137

H-Index

Active since

1994

Affiliations

Australian National University(Current)

Hajime Kuwahara is an author at Australian National University specializing in plasma-enhanced deposition, materials engineering, and natural sciences.

Publications per year

1994–1999

Publications

SiO2 deposition from oxygen/silane pulsed helicon diffusion plasmas

Christine Charles, R. W. Boswell, Hajime Kuwahara · Applied Physics Letters · 1995 · 46 citations

Natural Sciences, Materials Engineering, Materials Science +10

Bias formation in a pulsed radiofrequency argon discharge

H. B. Smith, Christine Charles, Rod Boswell et al. · Journal of Applied Physics · 1997 · 37 citations

Natural Sciences, Electrical Engineering, Physics +14

Study of Deposition Process in Modulated RF Silane Plasma

Hiroya Kirimura, Hiroshi Maeda, Hiroshi Murakami et al. · Japanese Journal of Applied Physics · 1994 · 28 citations

Natural Sciences, Materials Engineering, Materials Science +17

Progress in high deposition rate amorphous and polycrystalline silicon materials using the pulsed plasma and hot wire CVD deposition techniques

A. Madan, S. Morrison, Hajime Kuwahara · Solar Energy Materials and Solar Cells · 1999 · 16 citations

Engineering, Materials Engineering, Materials Science +17

Preparation of Al2O3 films by a new CVD process combining plasma and accelerated ion beams

Hiroshi Nakai, Hajime Kuwahara, Jōji Shinohara et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1996 · 10 citations

Natural Sciences, Materials Engineering, Materials Science +16

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