Concepedia

Publication | Closed Access

Electrical properties of AlN thin films deposited at low temperature on Si(100)

DOI

41

Citations

37

References

1999

Year

C. L. Aardahl, J.W. Rogers, H.K. Yun, Yosuke Ono, D. J. Tweet, S.T. Hsu
Thin Solid Films

References

YearCitations

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