Review of Scientific Instruments · 1985 · 36 citations · 2 references
EngineeringMaterials ScienceMechanical EngineeringMicroelectromechanical SystemsMicrofabricationRoboticsMems FabricationMicrofabrication ProcessesMicromachiningPiezoelectric ActuationScanning Probe MicroscopyInsulating MaterialsMetal Thin FilmsMicro-positioning SystemsMicropositionersMicropositioning SystemsNanopositioningNanopositioning SystemsQuartz
A simple walker is described that is suitable as the coarse positioner in a scanning tunneling microscope. The walker is fabricated from a single piece of piezoelectric ceramic and has feet coated with thin metal and insulating films. The walker can move in either of two orthogonal, horizontal directions on an insulated, metallized quartz substrate in steps that can be varied from 25 to 400 nm.
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G. Binnig, H. Rohrer · Surface Science · 1983 · 937 citations
Low-temperature vacuum tunneling microscopy
Scott Elrod, Alex de Lozanne, C. F. Quate · Applied Physics Letters · 1984 · 89 citations