The spatial resolution limit of electron lithography

Penetration and energy-loss theory of electrons in solid targets

K Kanaya, S. Okayama · Journal of Physics D Applied Physics · 1972 · 1.4K citations

Natural Sciences, Physics, Materials Physics +16

Classical Theory of Atomic Collisions. I. Theory of Inelastic Collisions

M. Gryziṅski · Physical Review · 1965 · 1.2K citations

Natural Sciences, Physics, Atomic Physics +16

Proximity effect in electron-beam lithography

T. H. P. Chang · Journal of Vacuum Science and Technology · 1975 · 533 citations

Engineering, Electrical Engineering, Computational Electromagnetics +9

A Convenient Method for Generating Normal Variables

George Marsaglia, T. A. Bray · SIAM Review · 1964 · 485 citations

Business, Decision Sciences, Optimization +6

The collision between two electrons

N. F. Mott · Proceedings of the Royal Society of London Series A Containing Papers of a Mathematical and Physical Character · 1930 · 213 citations · Full text

Natural Sciences, Physics, Mathematical Physics +15