Concepedia

S. Okayama

SO

9

Publications

1.5K

Citations

9

H-Index

1972

Active since

Affiliations

JEOL (Japan)(Current)

S. Okayama is an author at JEOL (Japan) specializing in engineering, microscopy, and applied physics.

Top concepts

EngineeringMicroscopyApplied PhysicsPhysicsMedicineOphthalmologyMaterial ScienceOptical PropertiesOptical MaterialsActive Optics

Publications per year

1972–2010

9

Publications

9

Penetration and energy-loss theory of electrons in solid targets

K Kanaya, S. Okayama · Journal of Physics D Applied Physics · 1972 · 1.4K citations

Materials Science, Diffusion Depth, Simple Atomic Model +15

Effect of Atomic Force on the Surface Corrugation of 2H-NbSe<sub>2</sub>Observed by Scanning Tunneling Microscopy

Hiroshi Bando, Hiroshi Tokumoto, Wataru Mizutani et al. · Japanese Journal of Applied Physics · 1987 · 27 citations

Crystal Structure, Large Surface Corrugation, Engineering +19

Nanobeam process system: An ultrahigh vacuum electron beam lithography system with 3 nm probe size

Hiroshi Hiroshima, S. Okayama, Masayoshi Ogura et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 26 citations

Engineering, Electron-beam Lithography, Microscopy +18

Observation of microfabricated patterns by scanning tunneling microscopy

S. Okayama, Masanori Komuro, Wataru Mizutani et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 24 citations

Materials Science, Microlithography Patterns, Engineering +14

A new correction lens

S. Okayama, Hisazo Kawakatsu · Journal of Physics E Scientific Instruments · 1982 · 17 citations

Adaptive Optic, New Correction Method, Engineering +15

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