Concepedia

Masayoshi Ogura

MO

2

Publications

43

Citations

2

H-Index

1994

Active since

Affiliations

JEOL (Japan)(Current)

Masayoshi Ogura is an author at JEOL (Japan) specializing in nanofabrication, engineering, and applied physics.

Top concepts

Publications per year

1994–1995

2

Publications

2

Nanobeam process system: An ultrahigh vacuum electron beam lithography system with 3 nm probe size

Hiroshi Hiroshima, S. Okayama, Masayoshi Ogura et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 26 citations

, , +18

New microfabrication technique by synchrotron radiation-excited etching: Use of noncontact mask on a submicrometer scale

Shingo Terakado, Takashi Goto, Masayoshi Ogura et al. · Applied Physics Letters · 1994 · 17 citations

, , +22

Rows per page

1–2 of 2