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Advanced activation trends for boron and arsenic by combinations of single, multiple flash anneals and spike rapid thermal annealing

Materials ScienceBoron NitrideEngineeringHexagonal Boron NitrideNanotechnologyNanoelectronicsCubic Boron NitrideApplied PhysicsRapid Thermal AnnealingMultiple Flash AnnealsAdvanced Activation TrendsMolecular Beam EpitaxyMicroelectronicsBorophene