Nitridation impact on thin oxide charge trapping - Concepedia

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Nitridation impact on thin oxide charge trapping

10

Citations

4

References

1997

Year

M. Alessandri, C. Clementi, B. Crivelli, G. Ghidini, F. Pellizzer, Miki Imai, Hidehiko Ikegawa

Microelectronic Engineering

EngineeringStress-induced Leakage CurrentOxide ElectronicsSurface ScienceApplied PhysicsNitridation ImpactCharge Transport

References

	Year	Citations

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