Concepedia
2010 · 223 citations · 16 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceThin FilmsChemical Vapor DepositionProcess SimulationThin-film DepositionChemical Vapor Deposition NucleationChemical Vapor Deposition PrecursorsCvd Coatings
16
Vapor Deposition of Metals by Hydrogen Reduction of Metal Chelates
Rudy L. Van Hemert, Lyle B. Spendlove, Robert E. Sievers · Journal of The Electrochemical Society · 1965 · 141 citations
Natural Sciences, Chemistry, Materials Science +16
Chemical Vapor Deposition of Thin-Film Platinum
Myron J. Rand · Journal of The Electrochemical Society · 1973 · 116 citations
Natural Sciences, Electrical Engineering, Materials Science +17
Laser Chemical Vapor Deposition of Gold: The Effect of Organometallic Structure
Thomas H. Baum · Journal of The Electrochemical Society · 1987 · 62 citations
Natural Sciences, Chemistry, Materials Science +14
Chemical Vapor Deposition of Gold
Carl E. Larson, Thomas H. Baum, Robert L. Jackson · Journal of The Electrochemical Society · 1987 · 54 citations
Natural Sciences, Chemistry, Materials Science +10
Kinetics of laser-induced chemical vapor deposition of gold
Toivo T. Kodas, T. H. Baum, Paul B. Comita · Journal of Applied Physics · 1987 · 51 citations
Natural Sciences, Materials Engineering, Materials Science +17