Carl E. Larson

Chemical vapor deposition of copper from 1,5-cyclooctadiene copper(I) hexafluoroacetylacetonate

Scott Reynolds, Christopher J. Smart, E. Baran et al. · Applied Physics Letters · 1991 · 112 citations

Natural Sciences, Chemistry, Materials Science +14

Determination of coupled acid catalysis-diffusion processes in a positive-tone chemically amplified photoresist

Frances A. Houle, William D. Hinsberg, M. Morrison et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 87 citations

Natural Sciences, Materials Engineering, Materials Science +17

A novel copper complex and CVD precursor: (.eta.2-butyne)copper(I) hexafluoroacetylacetonate

Thomas H. Baum, Carl E. Larson · Chemistry of Materials · 1992 · 72 citations

Natural Sciences, Chemistry, Materials Science +8

Carbon nanotube scanning probe for profiling of deep-ultraviolet and 193 nm photoresist patterns

Cattien V. Nguyen, Ramsey Stevens, Jabulani R. Barber et al. · Applied Physics Letters · 2002 · 70 citations

Natural Sciences, Materials Engineering, Materials Science +17

Laser-induced chemical vapor deposition of aluminum

Thomas H. Baum, Carl E. Larson, Robert L. Jackson · Applied Physics Letters · 1989 · 68 citations

Natural Sciences, Chemistry, Materials Science +14