Concepedia

Thomas H. Baum

TH

32

Publications

1.2K

Citations

21

H-Index

1985

Active since

Affiliations

IBM Research - Almaden(Current)

Danbury Hospital

IBM (United States)

University of Delaware

Siemens (Germany)

Thomas H. Baum is an author at IBM Research - Almaden specializing in engineering, chemistry, and materials science.

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Publications per year

1985–2009

32

Publications

32

Chemical vapor deposition of copper from 1,5-cyclooctadiene copper(I) hexafluoroacetylacetonate

Scott Reynolds, Christopher J. Smart, E. Baran et al. · Applied Physics Letters · 1991 · 111 citations

, , +9

Laser chemical vapor deposition of gold

Thomas H. Baum, Carol R. Jones · Applied Physics Letters · 1985 · 99 citations

, , +14

A novel copper complex and CVD precursor: (.eta.2-butyne)copper(I) hexafluoroacetylacetonate

Thomas H. Baum, Carl E. Larson · Chemistry of Materials · 1992 · 72 citations

, , +8

Chemical Vapor Deposition of Copper for IC Metallization: Precursor Chemistry and Molecular Structure

P. Doppelt, Thomas H. Baum · MRS Bulletin · 1994 · 71 citations

, , +9

Laser-induced chemical vapor deposition of aluminum

Thomas H. Baum, Carl E. Larson, Robert L. Jackson · Applied Physics Letters · 1989 · 68 citations

, , +11

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