T. H. Baum

High-resolution electron-beam induced deposition

Hans W. P. Koops, R. Weiel, D. P. Kern et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 240 citations

Engineering, Electron-beam Lithography, Tungsten Rich Deposits +21

Laser chemical vapor deposition of copper

Frances A. Houle, Carol R. Jones, T. H. Baum et al. · Applied Physics Letters · 1985 · 100 citations

Materials Science, Chemical Engineering, Copper Oxide Materials +12

LCVD of copper: Deposition rates and deposit shapes

Christopher R. Moylan, T. H. Baum, Carol R. Jones · Applied Physics A · 1986 · 89 citations

Materials Science, Deposit Shapes, Materials Engineering +6

Aerosol flow reactor production of fine Y1Ba2Cu3O7 powder: Fabrication of superconducting ceramics

Toivo T. Kodas, E. M. Engler, V. Y. Lee et al. · Applied Physics Letters · 1988 · 70 citations

Magnetic Properties, Aerosol Flow Reactor, Engineering +19

Photochemical generation and deposition of copper from a gas phase precursor

Carol R. Jones, Frances A. Houle, C. A. Kovac et al. · Applied Physics Letters · 1985 · 68 citations

Materials Science, Chemical Engineering, Copper Oxide Materials +13