Photochemical generation and deposition of copper from a gas phase precursor

Carol R. Jones, Frances A. Houle, C. A. Kovac, T. H. Baum

Applied Physics Letters · 1985 · 68 citations · 21 references

Concepts

Abstract

The photochemical generation and deposition of copper metal from a volatile copper coordination complex are described. Pulsed and cw ultraviolet light sources were used to induce deposition. The chemical compositions of the films are compared for all methods.

References

21