Laser Chemical Vapor Deposition of Gold: The Effect of Organometallic Structure

Abstract

The laser‐induced pyrolytic deposition (LCVD) of gold from dimethylgold acetylacetonate and two fluorinated derivates has been examined. The incorporation of fluorine substituents on the acetylacetonate ligand increases the vapor pressure of the organogold complex substantially. Rates of gold deposition are strongly dependent upon the vapor pressure and therefore, the gold complex utilized. Rates of deposition, deposit resistivities, and deposit purities are compared for each of the gold complexes.