Concepedia

Alkaline cleaning of silicon wafers: additives for the prevention of metal contamination

Aude Martin, M. Baeyens, W. Hub, Paul Mertens, Bernd O. Kolbesen

Microelectronic Engineering · 1999 · 27 citations · 3 references

DOI

Concepts

References

3

Cleaning solutions based on hydrogen peroxide for use in silicon semiconductor technology

Werner Kern · Medical Entomology and Zoology · 1970 · 820 citations

, , +14

H<sub>2</sub>O<sub>2</sub> Decomposition and Its Impact on Silicon Surface Roughening and Gate Oxide Integrity

H. Schmidt, Marc Meuris, Paul Mertens et al. · Japanese Journal of Applied Physics · 1995 · 37 citations

, , +17

Advanced Alkali Cleaning Solution for Simplification of Semiconductor Cleaning Process

Hitoshi Morinaga, Masumi Aoki, Toshiaki Maeda et al. · MRS Proceedings · 1997 · 27 citations

, , +10